Breakthrough MEMS Accelerometer Design Enhances Sensitivity in Compact Form

Scientists from ShanghaiTech University and the Shanghai Institute of Microsystem and Information Technology have developed a groundbreaking microelectromechanical systems (MEMS) accelerometer that significantly improves performance while maintaining a compact size.

The new design features an advanced anti-spring mechanism using two pre-shaped curved beams, which enables stiffness softening with substantially reduced bias force and displacement. This innovative approach increases sensitivity by 10.4%, reduces noise floor by 10.5%, and maintains a remarkably small chip size of just 4.2 mm × 4.9 mm.

Current MEMS accelerometers have struggled with limitations in resolution, noise floor, and sensitivity. Traditional methods often required bulky proof masses and complex structures to achieve higher performance. The research team's novel mechanism overcomes these constraints by dramatically reducing the bias force and displacement needed to achieve quasi-zero stiffness.

The breakthrough has potential applications across multiple industries, including earthquake detection, structural health monitoring, and precision inertial navigation systems. By enabling high-density, low-cost, and high-precision acceleration measurement, this technology could transform sensing capabilities in fields ranging from engineering to geophysics.

Dr. Fang Chen, a lead researcher, emphasized the significance of the innovation, noting that the design not only enhances sensitivity but also creates a more compact and integrable solution for advanced sensing technologies.

Future research will focus on refining bias tuning structures and optimizing interface circuits to further improve MEMS accelerometer performance, potentially opening new avenues for technological advancement in precision sensing.